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流量測量主機 |
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型 號:molbox RFM |
品 牌:美國FLUKE |
技術(shù)指標:用戶手冊、校準證書、電源線、(2) molbox RFM到molbloc壓線、(1) molbox RFM到molbloc數(shù)據(jù)線、(2)直通壓力快速連接器 |
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清徐流量測量主機-molbox RFM-美國FLUKE
molbox RFM是一個輔助單元,可使用molbloc-L層流和molbloc-S聲速流元件進行質(zhì)量流量測量。
molbloc 流量元件通過兩個壓力連接件和一根數(shù)據(jù)線連接到 molbox RFM 上。molbox RFM 從 molbloc EEPROM 讀取校準數(shù)據(jù),并利用其內(nèi)置的高精度參考壓力傳感器 (RPT) 測量 molbloc 的上游壓力和下游壓力。歐姆測量系統(tǒng)讀取 molbloc 鉑電阻測溫儀的電阻,然后由此計算 molbloc 溫度。利用存儲在 molbox RFM 內(nèi)存中的 molbloc 校準數(shù)據(jù)、壓力、溫度和氣體屬性,可計算出通過 molbloc 的氣流流速。對于 molbloc-L 流量元件,在流量量程 10% FS 以下時,可以選擇微量程選項來提高流量測量分辨度和精確度。
molbox RFM 和 molbloc 流量元件應(yīng)用廣泛,適用于需要高精確度測量低氣流的測量、測試和校準應(yīng)用。對于主要考慮結(jié)構(gòu)緊湊、量程可調(diào)性高、成本較低的應(yīng)用來說,,molbox RFM 是理想之選。第二種型號 molbox1+ 針對的優(yōu)先考慮不確定度的應(yīng)用。要配置質(zhì)量流量校準系統(tǒng),請查看隨后幾頁,選擇 molbloc 和壓力相關(guān)校準,以便更好的覆蓋您的流量量程和壓力狀況。molstic 安裝系統(tǒng)和 COMPASS® for
molbox 流量校準軟件可以幫您完善系統(tǒng)。
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結(jié)構(gòu)緊湊
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molbloc-L 覆蓋的流量量程從 1 sccm 到 100 slm,而 molbloc-S 覆蓋的流量上限更是達到了 5000 slm
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從 20 種不同的氣體中選擇
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利用 100:1 可調(diào)性實現(xiàn)認證的測量不確定度 ±0.5% 讀數(shù)
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內(nèi)部閥門,可實現(xiàn)內(nèi)置的清洗、泄漏測試和自重支持
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包括求和、取平均值、高值/低值及偏差等高級測量函數(shù)
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完善的前面板控制以及 RS232 和 IEEE-488 遠程通信
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利用可由用戶設(shè)置的參考壓力和溫度狀態(tài),測量質(zhì)量和體積流量
· 流量測量技術(shù)指標
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molbox RFM 可測量通過 molbloc 流量元件的流量。molbloc-L 的流量量程、可用工作壓力和壓力差,或者 molbloc-S 的流量量程、絕壓量程,取決于所使用的 molbloc 元件和校準選項。請參閱 molbloc-L 和 molbloc-S 量程表,了解校準和量程詳情。
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molbloc-L 量程最高可達 3E4,可通過微量程選項提高在 10% FS 以下時的分辨率和精確度。對于 1E5-L molbloc,必須使用微量程選項才能達到技術(shù)指標。
molbox RFM
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molbloc-L(量程從1E1-L到3E4-L)
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molbloc-S(所有量程)
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測量更新速率
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1秒
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1秒
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范圍
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到molbloc滿刻度,取決于氣體和molbloc壓力
取決于校準類型(請參閱molbloc-L量程表)
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流量相對于20 kPa到200 kPa絕壓(3 psia到30 psia)或20 kPa到200 kPa絕壓(7 psia到70 psia)上游
(請參閱molbloc-S量程表)
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分辨率
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0.01% FS
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±0.01%讀數(shù)
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線性
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±0.23%讀數(shù),從10%到100% FS
±0.023% FS,在10% FS以下
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±0.25%讀數(shù)
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重復性
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±0.1%讀數(shù),從10%到100% FS
±0.01% FS,在10% FS以下
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±0.1%讀數(shù)
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精確度1
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±0.25%讀數(shù),從10%到100% FS
±0.025% FS,在10% FS以下
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±0.3%讀數(shù)
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預(yù)測的穩(wěn)定度2
(一年期)
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±0.15%讀數(shù),從10%到100% FS
±0.015% FS,在10% FS以下
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讀數(shù)的±0.2%
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測量不確定度3
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±0.5%讀數(shù),從10%到100% FS
±0.05% FS,在10% FS以下
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±0.5%讀數(shù),從50 kPa到500 kPa,±0.5%流量@
50 kPa從20 kPa到50 kPa
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具有微量程選項的molbox RFM
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molbloc-L(量程從1E1-L到3E4-L)
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molbloc-L(量程僅僅是1E5)
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測量更新速率
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1秒
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1秒
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范圍
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從0到molbloc滿刻度,取決于氣體和molbloc壓力
取決于校準類型(請參閱molbloc-L表格)
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從0到molbloc滿刻度,取決于氣體和molbloc壓力
取決于校準類型(請參閱molbloc-L表格)
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分辨率
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0.01% FS,0.001% FS以下
10% FS
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0.01% FS
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線性
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±0.23%讀數(shù),從1%到100% FS;±0.0023% FS,在1% FS以下
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±0.25%讀數(shù),從5%到100% FS
±0.0125% FS,在5% FS以下
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重復性
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±0.1%讀數(shù),,從1%到100% FS
±0.001% FS,在1% FS以下
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±0.2%讀數(shù),從5%到100% FS
±0.01% FS,在5% FS以下
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精確度1
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±0.25%讀數(shù),從1%到100% FS
±0.0025% FS,在1% FS以下
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±0.32%讀數(shù),,從5%到100% FS
±0.016% FS,在5% FS以下
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預(yù)測的穩(wěn)定度2
(一年期)
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±0.15%讀數(shù),從1%到100% FS
±0.0015% FS,在1% FS以下
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±0.2%讀數(shù),從5%到100% FS
±0.01% FS,在5% FS以下
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測量不確定度3
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±0.5%讀數(shù),從1%到100% FS
±0.005% FS,在1% FS以下
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±0.5%讀數(shù),從5%到100% FS
±0.025% FS,在5% FS以下
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· molbloc-S(所有量程)
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除了沒有微量程以外,其他技術(shù)指標與 molbox RFM 相同。只要將 molbox RFM 連接到 molbloc-S 上,就會禁用微量程傳感器。
· 1 精確度:包含線性度、遲滯和可重復性。
· 2 預(yù)測的穩(wěn)定度:典型 molbox RFM 和 molbloc 在典型環(huán)境下使用時一年內(nèi)從零到范圍值的最大變化情況。由于穩(wěn)定度只能是一種預(yù)測,因此應(yīng)該根據(jù)經(jīng)驗建立特定 molbox RFM 的穩(wěn)定度。
· 3 測量不確定度:molbox RFM 流量指示相對于通過 molbloc 的流量真值的最大偏差,包括精確度、穩(wěn)定度和 DHI 校準標準不確定度。molbloc 的測量不確定度技術(shù)指標僅適用于使用的是 molbloc 校準過的氣體的情況。所有 molbloc 都針對 N2 校準過。其他氣體的校準是可選的。并非所有規(guī)格的 molbloc 在所有時間,對所有氣體都提供 DHI 校準功能。請在訂購前檢查是否可用。
型號
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描述
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Molbox
RFM
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molbox RFM參考流量監(jiān)控器
包含:
用戶手冊、校準證書、電源線、(2)
molbox RFM到molbloc壓線、(1) molbox RFM到molbloc數(shù)據(jù)線、(2)直通壓力快速連接器
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5141-100
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molbox RFM, molbloc 5E1-L 10
to 100 sccm
Included:
· molbox
RFM (5141 kits) or molbox RFM-M (5142 and 5144 kits) reference flow monitor
with quick connect molbloc pressure lines, molbloc communication cable, line
cord and user manual
· molbloc
5E1-L laminar flow element
· molstic-L
mounting system, with fine pressure regulator and an isolation valve and
precise flow metering valve for each molbloc-L
· Tubing
and adaptors to connect gas supply and device under test, including 1/4 in
tube fitting, 1/4 in NPT female, 1/4 in NPT male, 1/8 in NPT male and 1/4 in
BSP male
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5141-1K
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molbox RFM, molbloc 5E2-L 100
to 1,000 sccm
Included:
· molbox
RFM (5141 kits) or molbox RFM-M (5142 and 5144 kits) reference flow monitor
with quick connect molbloc pressure lines, molbloc communication cable, line
cord and user manual
· molbloc
5E2-L laminar flow element
· molstic-L
mounting system, with fine pressure regulator and an isolation valve and
precise flow metering valve for each molbloc-L
· Tubing
and adaptors to connect gas supply and device under test, including 1/4 in
tube fitting, 1/4 in NPT female, 1/4 in NPT male, 1/8 in NPT male and 1/4 in
BSP male
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5141-10K
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molbox RFM, molbloc 5E3-L 1 to
10 slm
Included:
· molbox
RFM (5141 kits) or molbox RFM-M (5142 and 5144 kits) reference flow monitor
with quick connect molbloc pressure lines, molbloc communication cable, line
cord and user manual
· molbloc
5E3-L laminar flow element
· molstic-L
mounting system, with fine pressure regulator and an isolation valve and
precise flow metering valve for each molbloc-L
· Tubing
and adaptors to connect gas supply and device under test, including 1/4 in
tube fitting, 1/4 in NPT female, 1/4 in NPT male, 1/8 in NPT male and 1/4 in
BSP male
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5141-50K
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molbox RFM, molbloc 3E4-L 5 to
50 slm
Included:
· molbox
RFM (5141 kits) or molbox RFM-M (5142 and 5144 kits) reference flow monitor
with quick connect molbloc pressure lines, molbloc communication cable, line
cord and user manual
· molbloc
3E4-L laminar flow element
· molstic-L
mounting system, with fine pressure regulator and an isolation valve and
precise flow metering valve for each molbloc-L
· Tubing
and adaptors to connect gas supply and device under test, including 1/4 in
tube fitting, 1/4 in NPT female, 1/4 in NPT male, 1/8 in NPT male and 1/4 in
BSP male
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5142-1K
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molbox RFM-M, molbloc 5E2-L 10
to 1,000 sccm
Included:
· molbox
RFM (5141 kits) or molbox RFM-M (5142 and 5144 kits) reference flow monitor
with quick connect molbloc pressure lines, molbloc communication cable, line
cord and user manual
· molbloc
5E2-L laminar flow element
· molstic-L
mounting system, with fine pressure regulator and an isolation valve and
precise flow metering valve for each molbloc-L
· Tubing
and adaptors to connect gas supply and device under test, including 1/4 in
tube fitting, 1/4 in NPT female, 1/4 in NPT male, 1/8 in NPT male and 1/4 in
BSP male
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5142-10K
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molbox RFM-M, molbloc 5E3-L
0.1 to 10 slm
Included:
· molbox
RFM (5141 kits) or molbox RFM-M (5142 and 5144 kits) reference flow monitor
with quick connect molbloc pressure lines, molbloc communication cable, line
cord and user manual
· molbloc
5E3-L laminar flow element
· molstic-L
mounting system, with fine pressure regulator and an isolation valve and
precise flow metering valve for each molbloc-L
· Tubing
and adaptors to connect gas supply and device under test, including 1/4 in
tube fitting, 1/4 in NPT female, 1/4 in NPT male, 1/8 in NPT male and 1/4 in
BSP male
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5142-50K
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molbox RFM-M, molbloc 3E4-L
0.5 to 50 slm
Included:
· molbox
RFM (5141 kits) or molbox RFM-M (5142 and 5144 kits) reference flow monitor
with quick connect molbloc pressure lines, molbloc communication cable, line
cord and user manual
· molbloc
3E4-L laminar flow element
· molstic-L
mounting system, with fine pressure regulator and an isolation valve and
precise flow metering valve for each molbloc-L
· Tubing
and adaptors to connect gas supply and device under test, including 1/4 in
tube fitting, 1/4 in NPT female, 1/4 in NPT male, 1/8 in NPT male and 1/4 in
BSP male
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5144-50K
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molbox RFM-M, molblocs 5E2-L
and 3E4-L10 sccm to 50 slm
Included:
· molbox
RFM (5141 kits) or molbox RFM-M (5142 and 5144 kits) reference flow monitor
with quick connect molbloc pressure lines, molbloc communication cable, line
cord and user manual
· molbloc
5E2-L and 3E4-L laminar flow elements
· molstic-L
mounting system, with fine pressure regulator and an isolation valve and
precise flow metering valve for each molbloc-L
· Tubing
and adaptors to connect gas supply and device under test, including 1/4 in
tube fitting, 1/4 in NPT female, 1/4 in NPT male, 1/8 in NPT male and 1/4 in
BSP male
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通用配件:
配件
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描述
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MFC-CB控制盒
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MFC-CB控制盒
包括:
(2)MFC/MFM連接線套件
校準線
電源線
操作與維護手冊
校準報告
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針對molbloc/molbo用戶的校準輔助軟件
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molstic-L安裝系統(tǒng)
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molstic-S安裝系統(tǒng)
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RFM-RMK
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機架安裝工具
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RFM
02
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微量程
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